JPH0115210B2 - - Google Patents

Info

Publication number
JPH0115210B2
JPH0115210B2 JP57114450A JP11445082A JPH0115210B2 JP H0115210 B2 JPH0115210 B2 JP H0115210B2 JP 57114450 A JP57114450 A JP 57114450A JP 11445082 A JP11445082 A JP 11445082A JP H0115210 B2 JPH0115210 B2 JP H0115210B2
Authority
JP
Japan
Prior art keywords
zinc oxide
oxide thin
thin film
vibrator
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57114450A
Other languages
English (en)
Japanese (ja)
Other versions
JPS595725A (ja
Inventor
Koji Nishama
Takeshi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP57114450A priority Critical patent/JPS595725A/ja
Priority to US06/509,028 priority patent/US4445066A/en
Publication of JPS595725A publication Critical patent/JPS595725A/ja
Publication of JPH0115210B2 publication Critical patent/JPH0115210B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Die Bonding (AREA)
JP57114450A 1982-06-30 1982-06-30 酸化亜鉛薄膜の電極構造 Granted JPS595725A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57114450A JPS595725A (ja) 1982-06-30 1982-06-30 酸化亜鉛薄膜の電極構造
US06/509,028 US4445066A (en) 1982-06-30 1983-06-29 Electrode structure for a zinc oxide thin film transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57114450A JPS595725A (ja) 1982-06-30 1982-06-30 酸化亜鉛薄膜の電極構造

Publications (2)

Publication Number Publication Date
JPS595725A JPS595725A (ja) 1984-01-12
JPH0115210B2 true JPH0115210B2 (en]) 1989-03-16

Family

ID=14638031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57114450A Granted JPS595725A (ja) 1982-06-30 1982-06-30 酸化亜鉛薄膜の電極構造

Country Status (1)

Country Link
JP (1) JPS595725A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009060478A (ja) * 2007-09-03 2009-03-19 Nippon Dempa Kogyo Co Ltd 圧電振動片の製造方法及び音叉型圧電振動片

Also Published As

Publication number Publication date
JPS595725A (ja) 1984-01-12

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